Achieving self-reliance and control in the semiconductor industry is an urgent priority, with the domestic production of ultra-high-purity electronic specialty gases accelerating.

Achieving self-reliance and control within the semiconductor industry has become a matter of national strategy and security. Throughout the entire chip manufacturing process, including critical steps such as lithography, etching, thin-film deposition, and doping, hundreds of high-purity electronic specialty gases are required. The purity and stability of these gases directly impact chip yield rates and performance. Historically, this market has been monopolised by a handful of international giants.
In recent years, the rapid expansion of domestic chip manufacturing capacity and the urgent need for supply chain security have presented a valuable historical window of opportunity for domestic electronic specialty gas enterprises. Policy guidance at the national level and support from industrial capital have prompted a number of domestic gas companies to increase R&D investment and tackle difficult challenges. In areas such as mixed gases (neon, krypton, xenon) and critical high-purity electronic gases (nitrogen trifluoride, tungsten hexafluoride), several leading domestic enterprises have achieved technological breakthroughs. Their product quality now meets internationally advanced standards, and they are progressively entering the supply chains of mainstream domestic wafer fabs, commencing small-batch supply or undergoing certification.
Nevertheless, the path to domestic production of electronic specialty gases remains fraught with challenges. On one hand, wafer fabs impose lengthy certification cycles and exceptionally stringent standards, creating formidable barriers to supply chain entry. On the other, domestic production rates remain low for gases required in more advanced process nodes. Nevertheless, it is undeniable that driven by both substantial market demand and pressing industrial security requirements, the domestic substitution of electronic specialty gases is accelerating comprehensively. This has become an indispensable component in the development of China's semiconductor industry ecosystem.